Semiconductor Equipment Standard Communication and Control Application Software

SECS/GEM Communication - A Seamless Integration

Features & Benefits

SECS/GEMFully compliant with the SEMI standards, feature API interface for fast adoption

Friendly User InterfaceThe user-friendly interface enables fast setup and significantly reduces deployment time

Anomaly TrackingProvides complete SECS event history to track anomaly causes

SimulatorConduct functional verification and stress testing, accelerating equipment integration and introduction time

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Solutions - Semiconductor Equipment Standard Communication and Control Application Software - Delta